Inventor
NAGASHIMA YUJI
JP20 patents
⚠️ This page may combine multiple inventors who share the name “NAGASHIMA YUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHIBAURA MECHATRONICS CORP
10 patentsUS10460961B2Oct 29, 2019
Substrate processing apparatus
SHIBAURA MECHATRONICS CORP3 citations72
US10281210B2May 7, 2019
Substrate processing apparatus and substrate processing method
SHIBAURA MECHATRONICS CORP4 citations72
US9607865B2Mar 28, 2017
Substrate processing device and substrate processing method
SHIBAURA MECHATRONICS CORP2 citations72
US9553003B2Jan 24, 2017
Substrate processing device and substrate processing method
SHIBAURA MECHATRONICS CORP6 citations72
US10325787B2Jun 18, 2019
Substrate processing apparatus and substrate processing method
SHIBAURA MECHATRONICS CORP1 citations60
US12354869B2Jul 8, 2025
Substrate treatment method and substrate treatment apparatus
SHIBAURA MECHATRONICS CORP0 citations51
US9972513B2May 15, 2018
Device and method for treating a substrate with hydrofluoric and nitric acid
SHIBAURA MECHATRONICS CORP1 citations51
US10406566B2Sep 10, 2019
Substrate processing device and substrate processing method
SHIBAURA MECHATRONICS CORP0 citations50
US10276406B2Apr 30, 2019
Substrate processing device and substrate processing method
SHIBAURA MECHATRONICS CORP0 citations41
US9966282B2May 8, 2018
Substrate processing apparatus and substrate processing method
SHIBAURA MECHATRONICS CORP0 citations41