Inventor · disambiguated record

Stephan Zschäck

Also filed as: ZSCHÄCK STEPHAN

0 granted patents·1 pending application·0 citations·filing 2024–2024

Technology areasG03F

Files withZEISS CARL SMT GMBH1

Top patents by PatentIndex Score

1 record

0157US2025237968A1Screw transmission drive, and reticle stage and measuring device for semiconductor lithography applicationsZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →