Inventor
YOON CHEOL SANG
KR2 patents
Patents
2 patentsUS10692820B2Jun 23, 2020
Hybrid composite film, method of fabricating the same, and integrated circuit device including hybrid composite film
SAMSUNG ELECTRONICS CO LTD2 citations64
US10825674B2Nov 3, 2020
Apparatus and method for mass spectrometry, and method for analyzing semiconductor wafer
SAMSUNG ELECTRONICS CO LTD0 citations39