Inventor
ZORICH ROBERT SAM
US10 patents
Patents
10 patentsUS6341615B1Jan 29, 2002
Self-cleaning vacuum purge system
AIR PROD & CHEM28 citations91
US6526824B2Mar 4, 2003
High purity chemical container with external level sensor and liquid sump
AIR PROD & CHEM69 citations90
US6138691AOct 31, 2000
Solvent purge mechanism
AIR PROD & CHEM36 citations90
US5964230AOct 12, 1999
Solvent purge mechanism
AIR PROD & CHEM43 citations90
US6431229B1Aug 13, 2002
Solventless purgeable diaphragm valved manifold for low vapor pressure chemicals
AIR PROD & CHEM49 citations89
US6837251B1Jan 4, 2005
Multiple contents container assembly for ultrapure solvent purging
AIR PROD & CHEM12 citations82
US6913029B2Jul 5, 2005
Multiple contents container assembly for ultrapure solvent purging
AIR PROD & CHEM8 citations72
US6840252B2Jan 11, 2005
Multiple contents container assembly for ultrapure solvent purging
AIR PROD & CHEM7 citations72
US6838573B1Jan 4, 2005
Copper CVD precursors with enhanced adhesion properties
AIR PROD & CHEM7 citations69
US6534666B1Mar 18, 2003
Use of water and acidic water to purify liquid MOCVD precursors
AIR PROD & CHEM5 citations59