Multiple contents container assembly for ultrapure solvent purging

Abstract

A process and apparatus to deliver both process chemical and solvent for cleaning the process chemical in a solvent purge refill system along with an integral solvent sorption module, in a single “assembly” that permits ease of shipping, minimal end-user interaction, sufficient solvent for the solvent purge operation, without residual solvent, requiring disposal. This eliminates customer handling of the solvent, and eliminates the customer's need to find a solvent waste facility, as residual solvent can be returned in the same package in one piece/one step.

1. A high purity source chemical container assembly, comprising; a high ouritv source chemical container, at least one inlet to the interior of the source chemical container, at least one outlet from the interior of the source chemical container, at least one source chemical solvent ampoule integral to said assembly, at least one inlet to the interior of the source chemical solvent ampoule, at least one outlet from the interior of the source chemical solvent ampoule, at least one solvent capture ampoule integral to said assembly sized to accommodate source chemical solvent from said source chemical solvent ampoule, and at least one orifice communicating with the interior of the solvent capture ampoule, wherein the source chemical solvent ampoule is inside said high purity source chemical container and said inlet to the interior of the source chemical solvent ampoule and said outlet from the interior of the source chemical solvent ampoule access an exterior of said high purity source chemical container. 
   
   
     2. The assembly of  claim 1  wherein the solvent capture ampoule is inside said high purity source chemical container and said orifice communicating with the interior of the solvent capture ampoule accesses an exterior of said high purity source chemical container. 
   
   
     3. The assembly of  claim 2  wherein said high purity source chemical container has a diptube connected to said outlet and extending to a point adjacent a bottom of said high purity source chemical container. 
   
   
     4. The assembly of  claim 2  wherein said high purity source chemical container has a level sensor communicating with an exterior of said container and extending to a point adjacent a bottom of said high purity source chemical container. 
   
   
     5. The assemy of  claim 4  wherein said level sensor is selected from the group consisting of a float level sensor, an ultrasonic level sensor, a capacitance level sensor, an optical level sensor and combinations thereof. 
   
   
     6. The assembly of  claim 2  wherein said inlet and said outlet of said high purity source chemical container each have a valve for controlling flow of pressurizing fluid or high purity source chemical, respectively. 
   
   
     7. The assembly of  claim 6  wherein said valve is selected from the group consisting of a pneumatic valve, a solenoid valve, a manual valve and combinations thereof. 
   
   
     8. The assembly of  claim 2  wherein said source chemical solvent ampoule has a diptube connected to said outlet of said source chemical solvent ampoule and extending to a point adjacent a bottom of said source chemical solvent ampoule. 
   
   
     9. The assembly of  claim 2  wherein said inlet to said high purity source chemical container is connected to a source of pressurizing inert gas. 
   
   
     10. The assembly of  claim 2  wherein said inlet to said source chemical solvent ampoule is connected to a source of pressurizing inert gas. 
   
   
     11. The assembly of  claim 2  wherein said source chemical solvent ampoule contains a solvent under pressure without connection to an external source of pressure. 
   
   
     12. The assembly of  claim 2  wherein said solvent capture ampoule has two orifices. 
   
   
     13. The assembly of  claim 12  wherein one of said orifices of said solvent capture ampoule is connected to one of a low pressure vent or source of vacuum. 
   
   
     14. The assembly of  claim 2  wherein the interior of said solvent capture ampoule is under vacuum without connection to a source of vacuum. 
   
   
     15. The assembly of  claim 2  wherein said assembly has a quantity of high purity source chemical contained in said high purity source chemical container selected from the group consisting of tantalum pentaethoxide (TAETO), tetrakis(diethylamino) titanium (TDEAT), tetrakis(dimethylamino) titanium (TDMAT), tetramethylcyclotetrasiloxane (TMCTS), copper hexafluoroacetylacetonate-trimethylvinylsilane (Cu(hfac)TMVS), tetraethylorthosilicate (TEOS), trimethylborate (TMB), triethylborate (TEB), trimethylphosphite (TMPi), triethylphosphate (TEPO), bistertiarybutylaminosilane (BTBAS), tantalumtetraethoxidedimethylamifloethoXide (TAT-DMAE), t-butylimidotrisdiethylamido tantalum (TBTDET), triethyl arsenite (TEQA), polyarylene ethers and mixtures thereof. 
   
   
     16. The assembly of  claim 2  wherein said assembly has a quantity of source chemical solvent contained in said source chemical solvent ampoule selected from the group consisting of organic alcohols such as methanol, ethanol, propanol, butanol, acetone, tetrahydrofuran, dimethylsiloxane, water, aliphatic hydrocarbons such as hexane, heptane, octane, decane, and dodecane, aromatic hydrocarbons, ketones, aldehydes, hydrocarbons, ethers, esters, glymes, aromatic hydrocarbons, halogen containing alcohols, alkyl nitriles, alkanols, organic amines, fluorinated compounds, pertluorocarbons such as pert luorohexane and pert luoroheptane and mixtures thereof. 
   
   
     17. The assembly of  claim 2  wherein said solvent capture ampoule has at least two orifices comprising at least one inlet for solvent entry and at least on outlet to facilitate venting, each orifice having a valve for closing said orifices wherein said valve is selected from the group consisting of pneumatic, manual, electrical, hydraulic, solenoid and combinations thereof, a diptube that extends to near the bottom of the solvent capture ampoule and a level sense selected from the group consisting of floats, optical, capacitive, weight, thermal, or combinations thereof. 
   
   
     18. The assembly of  claim 2  wherein said source chemical solvent ampoule contains a solvent for the high purity source chemical that reacts with the high purity source chemical to create soluble byproducts.