Inventor
ROBERTS DAVID ALLEN
US18 patents
Patents
18 patentsUS6238734B1May 29, 2001
Liquid precursor mixtures for deposition of multicomponent metal containing materials
AIR PROD & CHEM570 citations99
US5976991ANov 2, 1999
Deposition of silicon dioxide and silicon oxynitride using bis(tertiarybutylamino) silane
AIR PROD & CHEM101 citations97
US6869876B2Mar 22, 2005
Process for atomic layer deposition of metal films
AIR PROD & CHEM71 citations95
US5874368AFeb 23, 1999
Silicon nitride from bis(tertiarybutylamino)silane
AIR PROD & CHEM186 citations94
US6503561B1Jan 7, 2003
Liquid precursor mixtures for deposition of multicomponent metal containing materials
AIR PROD & CHEM40 citations92
US6526824B2Mar 4, 2003
High purity chemical container with external level sensor and liquid sump
AIR PROD & CHEM69 citations90
US6818783B2Nov 16, 2004
Volatile precursors for deposition of metals and metal-containing films
AIR PROD & CHEM31 citations89
US7119032B2Oct 10, 2006
Method to protect internal components of semiconductor processing equipment using layered superlattice materials
AIR PROD & CHEM14 citations84
US6500499B1Dec 31, 2002
Deposition and annealing of multicomponent ZrSnTi and HfSnTi oxide thin films using solventless liquid mixture of precursors
AIR PROD & CHEM14 citations83
US6837251B1Jan 4, 2005
Multiple contents container assembly for ultrapure solvent purging
AIR PROD & CHEM12 citations82
US6096913AAug 1, 2000
Production of metal-ligand complexes
AIR PROD & CHEM7 citations74
US7078358B2Jul 18, 2006
Low VOC cleanroom cleaning wipe
AIR PROD & CHEM10 citations73
US6913029B2Jul 5, 2005
Multiple contents container assembly for ultrapure solvent purging
AIR PROD & CHEM8 citations72
US6840252B2Jan 11, 2005
Multiple contents container assembly for ultrapure solvent purging
AIR PROD & CHEM7 citations72
US6770254B2Aug 3, 2004
Purification of group IVb metal halides
AIR PROD & CHEM2 citations62
US6534666B1Mar 18, 2003
Use of water and acidic water to purify liquid MOCVD precursors
AIR PROD & CHEM5 citations59
US7919409B2Apr 5, 2011
Materials for adhesion enhancement of copper film on diffusion barriers
AIR PROD & CHEM1 citations50
US7662959B2Feb 16, 2010
Quaternary trifluoromethylcyclohexane derivatives for liquid crystals
AIR PROD & CHEM0 citations32