Inventor
SORABJI KHURSHED
US34 patents
⚠️ This page may combine multiple inventors who share the name “SORABJI KHURSHED”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
9 patentsUS7378618B1May 27, 2008
Rapid conductive cooling using a secondary process plane
APPLIED MATERIALS INC400 citations99
US9390950B2Jul 12, 2016
Rapid thermal processing chamber with micro-positioning system
APPLIED MATERIALS INC15 citations92
US7812286B2Oct 12, 2010
Rapid conductive cooling using a secondary process plane
APPLIED MATERIALS INC18 citations92
US6888104B1May 3, 2005
Thermally matched support ring for substrate processing chamber
APPLIED MATERIALS INC41 citations92
US9564349B2Feb 7, 2017
Rapid thermal processing chamber with micro-positioning system
APPLIED MATERIALS INC4 citations84
US8900889B2Dec 2, 2014
Rapid thermal processing chamber with micro-positioning system
APPLIED MATERIALS INC10 citations84
US8698049B2Apr 15, 2014
Rapid thermal processing lamphead with improved cooling
APPLIED MATERIALS INC6 citations84
US7612491B2Nov 3, 2009
Lamp for rapid thermal processing chamber
APPLIED MATERIALS INC8 citations84
US9209049B2Dec 8, 2015
Rapid conductive cooling using a secondary process plane
APPLIED MATERIALS INC3 citations63
SORABJI KHURSHED
5 patentsUS8222574B2Jul 17, 2012
Temperature measurement and control of wafer support in thermal processing chamber
SORABJI KHURSHED62 citations95
US8314371B2Nov 20, 2012
Rapid thermal processing chamber with micro-positioning system
SORABJI KHURSHED18 citations92
US8227729B2Jul 24, 2012
Rapid conductive cooling using a secondary process plane
SORABJI KHURSHED12 citations92
US8111978B2Feb 7, 2012
Rapid thermal processing chamber with shower head
SORABJI KHURSHED21 citations92
US8658947B2Feb 25, 2014
Rapid conductive cooling using a secondary process plane
SORABJI KHURSHED8 citations84
HE GANG
5 patentsUS8602707B2Dec 10, 2013
Methods and apparatus for a chemical vapor deposition reactor
HE GANG5 citations71
US8985911B2Mar 24, 2015
Wafer carrier track
HE GANG2 citations62
US8859042B2Oct 14, 2014
Methods for heating with lamps
HE GANG1 citations51
US9169554B2Oct 27, 2015
Wafer carrier track
HE GANG0 citations41
US8852696B2Oct 7, 2014
Method for vapor deposition
HE GANG0 citations41
HIGASHI GREGG
4 patentsUS9175393B1Nov 3, 2015
Tiled showerhead for a semiconductor chemical vapor deposition reactor
HIGASHI GREGG16 citations83
US9212422B2Dec 15, 2015
CVD reactor with gas flow virtual walls
HIGASHI GREGG3 citations62
US9982346B2May 29, 2018
Movable liner assembly for a deposition zone in a CVD reactor
HIGASHI GREGG0 citations51
US9644268B2May 9, 2017
Thermal bridge for chemical vapor deposition reactors
HIGASHI GREGG0 citations41
ALTA DEVICES INC
4 patentsUS10066297B2Sep 4, 2018
Tiled showerhead for a semiconductor chemical vapor deposition reactor
ALTA DEVICES INC5 citations73
US10718051B2Jul 21, 2020
Methods for chemical vapor deposition (CVD) in a movable liner assembly
ALTA DEVICES INC0 citations52
US10076896B2Sep 18, 2018
Pressurized heated rolling press for manufacture and method of use
ALTA DEVICES INC1 citations52
US9859162B2Jan 2, 2018
Perforation of films for separation
ALTA DEVICES INC0 citations41
KOELMEL BLAKE
3 patentsUS8057602B2Nov 15, 2011
Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber
KOELMEL BLAKE63 citations97
US8057601B2Nov 15, 2011
Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber
KOELMEL BLAKE11 citations84
US8490660B2Jul 23, 2013
Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber
KOELMEL BLAKE3 citations62