Inventor · disambiguated record
Oleg Viacheslavovich Voznyi
Also filed as: VOZNYI OLEG · VOZNYI OLEG VIACHESLAVOVICH
6 granted patents·3 pending applications·19 citations·filing 2006–2022
77Inventor score
Top patents by PatentIndex Score
9 records- 0191US8730448B2Lithographic apparatus and device manufacturing methodNIENHUYS HAN-KWANG·Filed 2012·Granted May 20, 2014·9 cites·19 claims
- 0280US9019476B2Lithographic apparatus and device manufacturing methodCOMPEN RENE THEODORUS PETRUS·Filed 2011·Granted Apr 28, 2015·4 cites·20 claims
- 0367US8797504B2Lithographic apparatus and device manufacturing methodNIENHUYS HAN-KWANG·Filed 2012·Granted Aug 5, 2014·1 cites·19 claims
- 0465US7978308B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jul 12, 2011·2 cites·23 claims
- 0558US8576374B2Lithographic apparatus and methodBEST KEITH FRANK·Filed 2009·Granted Nov 5, 2013·3 cites·6 claims
- 0658US2025028258A1Compensating optical system for nonuniform surfaces, a metrology system, lithographic apparatus, and methods thereofASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0755US11860554B2Object positioner, method for correcting the shape of an object, lithographic apparatus, object inspection apparatus, device manufacturing methodASML NETHERLANDS BV·Filed 2020·Granted Jan 2, 2024·0 cites·20 claims
- 0853US2023251583A1System and method for conditioning optical apparatusesASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 0950US2010060869A1Lithographic apparatus and alignment methodASML NETHERLANDS BV·Filed 2009·Application pending·0 cites
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