Inventor · disambiguated record

Christian Enkrich

Also filed as: ENKRICH CHRISTIAN

1 granted patent·4 citations·filing 2011–2011

24Inventor score

Technology areasG03F

Files withKLA TENCOR MIE GMBH1

Top patents by PatentIndex Score

1 record

0173US8352886B2Method for the reproducible determination of the position of structures on a mask with a pellicle frameKLA TENCOR MIE GMBH·Filed 2011·Granted Jan 8, 2013·4 cites·9 claims

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