Inventor

BAIK KI HO

KR91 patents

⚠️ This page may combine multiple inventors who share the name “BAIK KI HO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BAIK KI HO

HYUNDAI ELECTRONICS IND

Partially crosslinked polymer for bilayer photoresist

Partially crosslinked polymer for bilayer photoresist

Photoresist monomers having stability to post exposure delay, polymers thereof and photoresist compositions containing the same

Polymer and a forming method of a micro pattern using the same

Polymer and a forming method of a micro pattern using the same

ArF photoresist copolymers

Photoresist cross-linker and photoresist composition comprising the same

Oxabicyclo compound, a polymer-containing said compound, and a photoresist micro pattern forming method using the same

ArF photoresist copolymers

Polymer-containing photoresist, and process for manufacturing the same

Organic anti-reflective coating polymer and preparation thereof

Photoresist monomer having hydroxy group and carboxy group, copolymer thereof and photoresist composition using the same

Photoresist composition containing photo base generator with photo acid generator

Copolymer resin, preparation thereof, and photoresist using the same

Semiconductor device using polymer-containing photoresist, and process for manufacturing the same

Photoresist polymers of carboxyl-containing alicyclic compounds

Photoresist monomers, polymers thereof, and photoresist compositions containing the same

Photoresist monomers, polymers thereof, and photoresist compositions containing the same

Maleimide or alicyclic olefin-based monomers, copolymer resin of these monomers and photoresist using the resin

Method and photoresist using a photoresist copolymer

Method for forming resist patterns comprising two photoresist layers and an intermediate layer

Organic anti-reflective coating polymer and preparation thereof

Organic anti-reflective polymer and method for manufacturing thereof

Organic anti-reflective coating material and its preparation

Anti reflective coating polymers and the preparation method thereof

Process for forming a photoresist pattern by top surface imaging process

Stencil mask

Organic anti-reflective coating material and its preparation

Method for forming micro patterns of semiconductor devices

Over-coating composition for photoresist, and processes for forming photoresist patterns using the same

Anti reflective coating polymers and the preparation method thereof

Photoresist monomer, polymer thereof and photoresist composition containing it

Cross-linker monomer comprising double bond and photoresist copolymer containing the same

Polymers and photoresist compositions using the same

Photoresist cross-linker and photoresist composition comprising the same

Monomers for photoresist, polymers thereof, and photoresist compositions using the same

Organic anti-reflective coating polymer and preparation thereof

Photoresist composition for resist flow process, and process for forming contact hole using the same

Organic anti-reflective polymer and method for manufacturing thereof

Cross-linker for photoresist, and process for forming a photoresist pattern using the same

Photoresist polymers and photoresist composition containing the same

Photoresist monomer, polymer thereof and photoresist composition containing it

Thiabicyclo compound, a polymer-containing said compound, and a photoresist micro pattern forming method using the same

HYNIX SEMICONDUCTOR INC

Photoresist composition containing photo radical generator with photoacid generator

Partially crosslinked polymer for bilayer photoresist

Top-coating composition for photoresist and process for forming fine pattern using the same

Photoresist composition for resist flow process

Cross-linker monomer comprising double bond and photoresist copolymer containing the same

Process for forming photoresist pattern by using gas phase amine treatment

Organic anti-reflective coating polymer, anti-reflective coating composition methods of preparation thereof