Inventor · disambiguated record
Matthew J. Van Doren
Also filed as: VAN DOREN MATTHEW · VAN DOREN MATTHEW J · VAN DOREN MATTHEW JAMES
7 granted patents·2 pending applications·415 citations·filing 1995–2023
87Inventor score
Files withSILICON VALLEY GROUP3VEECO INSTR INC3ASML HOLDING NV1LANSBERGEN ROBERT GABRIEL MARIA1ZYGO CORP1
Top patents by PatentIndex Score
9 records- 0194US7869003B2Lithographic apparatus and device manufacturing method with reticle gripperASML HOLDING NV·Filed 2006·Granted Jan 11, 2011·32 cites·21 claims
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- 0654USD921431SMulti-filament heater assemblyVEECO INSTR INC·Filed 2019·Granted Jun 8, 2021·6 cites·1 claims
- 0751US6876453B2Metrology system for precision 3D motionZYGO CORP·Filed 2003·Granted Apr 5, 2005·5 cites·10 claims
- 0848US2023060609A1Wafer carrier assembly with pedestal and cover restraint arrangements that control thermal gapsVEECO INSTR INC·Filed 2021·Application pending·0 cites
- 0941US8614786B2Robot for in-vacuum useLANSBERGEN ROBERT GABRIEL MARIA·Filed 2009·Granted Dec 24, 2013·0 cites·18 claims
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