Inventor · disambiguated record
Takaya Kikai
Also filed as: KIKAI TAKAYA
6 granted patents·0 citations·filing 2018–2020
65Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD6
Top patents by PatentIndex Score
6 records- 0160US10867817B2Substrate processing apparatus, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2020·Granted Dec 15, 2020·0 cites·15 claims
- 0257US11469115B2Substrate processing apparatus, substrate processing method and recording mediumTOKYO ELECTRON LTD·Filed 2020·Granted Oct 11, 2022·0 cites·3 claims
- 0352US10615062B2Substrate processing apparatus, substrate processing method, and storage mediumTOKYO ELECTRON LTD·Filed 2018·Granted Apr 7, 2020·0 cites·15 claims
- 0450US10867813B2Substrate processing apparatus, substrate processing method and recording mediumTOKYO ELECTRON LTD·Filed 2018·Granted Dec 15, 2020·0 cites·10 claims
- 0546US11256172B2Light irradiating device, light irradiating method and recording mediumTOKYO ELECTRON LTD·Filed 2020·Granted Feb 22, 2022·0 cites·7 claims
- 0646US11049739B2Ashing apparatus, ashing method and recording mediumTOKYO ELECTRON LTD·Filed 2019·Granted Jun 29, 2021·0 cites·9 claims
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →