Inventor

MARKLE RICHARD J

US40 patents

⚠️ This page may combine multiple inventors who share the name “MARKLE RICHARD J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

MARKLE RICHARD J

ADVANCED MICRO DEVICES INC

Method and apparatus for performing overlay measurements using scatterometry

Method and apparatus for monitoring tool health

Plasma state monitoring to control etching processes and across-wafer uniformity, and system for performing same

Method and apparatus for determining grid dimensions using scatterometry

Automated integrated circuit device manufacturing facility using central control

Method and apparatus for calibrating degradable components using process state data

Method and apparatus for fault classification based on residual vectors

Conflict resolution among multiple controllers

Method and apparatus for modifying design constraints based on observed performance

Methods of controlling formation of metal silicide regions, and system for performing same

Process control based upon weight or mass measurements, and systems for accomplishing same

Method and system for controlling a process tool

Method and apparatus for determining column dimensions using scatterometry

Method and apparatus for detecting processing faults using scatterometry measurements

Method and apparatus for fault detection using multiple tool error signals

Method of controlling photolithography processes based upon scatterometric measurements of photoresist thickness, and system for accomplishing same

Automated integrated circuit device manufacturing facility using distributed control

Troubleshooting method involving image-based fault detection and classification (FDC) and troubleshooting guide (TSG), and systems embodying the method

Methodology for improved semiconductor process monitoring using optical emission spectroscopy

Measurement system for detecting chemical species within a semiconductor processing device chamber

Device and method for aligning a laser

Method and apparatus for dynamic adjustment of a sampling plan based on wafer electrical test data

Method and apparatus for fault detection classification of multiple tools based upon external data

Method for determining process layer thickness using scatterometry measurements

Fault detection spanning multiple processes

Process control based on an estimated process result

Verifying a fault detection result based on a process control state

Method and apparatus for determining electromagnetic properties of a process layer using scatterometry measurements

Various methods of controlling conformal film deposition processes, and a system for accomplishing same

Adjustable wafer stage, and a method and system for performing process operations using same

Method and apparatus for determining contact opening dimensions using scatterometry

Fault detection and control methodologies for ion implantation processes, and system for performing same

Method and apparatus for coordinating fault detection settings and process control changes

Secondary process controller for supplementing a primary process controller

Method of integrating scatterometry metrology structures directly into die design

Methods of controlling wet chemical processes in forming metal silicide regions, and system for performing same

Method and apparatus for dynamic adjustment of sensor and/or metrology sensitivities

GLOBALFOUNDRIES INC

Method and apparatus for dynamically determining tester recipes

Method and apparatus for modifying process selectivities based on process state information

ADVANCED MIRCO DEVICES INC

Total tool control for semiconductor manufacturing