Inventor
MERA KAZUO
JP15 patents
⚠️ This page may combine multiple inventors who share the name “MERA KAZUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
14 patentsUS5945681AAug 31, 1999
Ion implanting apparatus capable of preventing discharge flaw production on reverse side surface of wafer
HITACHI LTD53 citations96
US5753923AMay 19, 1998
Ion injection device and method therefor
HITACHI LTD78 citations95
US6429442B1Aug 6, 2002
Ion implanter
HITACHI LTD26 citations92
US5045679ASep 3, 1991
Optical path adjusting system with dual-axis wedge prisms
HITACHI LTD31 citations92
US5229569AJul 20, 1993
Laser machining apparatus and method of the same
HITACHI LTD24 citations91
US5157235AOct 20, 1992
Laser marking system
HITACHI LTD29 citations91
US6570171B2May 27, 2003
Ion implanter
HITACHI LTD5 citations73
US6501080B1Dec 31, 2002
Ion implanting apparatus and sample processing apparatus
HITACHI LTD6 citations73
US6362490B1Mar 26, 2002
Ion implanter
HITACHI LTD11 citations73
US5932883AAug 3, 1999
Ion implanter for implanting ion on wafer with low contamination
HITACHI LTD13 citations73
US6667485B2Dec 23, 2003
Ion implanting apparatus and sample processing apparatus
HITACHI LTD2 citations62
US6614190B2Sep 2, 2003
Ion implanter
HITACHI LTD5 citations62
US6403969B1Jun 11, 2002
Ion implantation system and ion implantation method
HITACHI LTD4 citations62
US6104025AAug 15, 2000
Ion implanting apparatus capable of preventing discharge flaw production on reverse side surface of wafer
HITACHI LTD4 citations62