Inventor
CHEN TERRY CHUNG-YI
TW7 patents
⚠️ This page may combine multiple inventors who share the name “CHEN TERRY CHUNG-YI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNITED MICROELECTRONICS CORP
5 patentsUS6200890B1Mar 13, 2001
Method of fabricating copper damascene
UNITED MICROELECTRONICS CORP18 citations81
US6534354B1Mar 18, 2003
Method of manufacturing MOS transistor with fluorine implantation at a low energy
UNITED MICROELECTRONICS CORP9 citations72
US6300238B1Oct 9, 2001
Method of fabricating node contact opening
UNITED MICROELECTRONICS CORP12 citations72
US6569726B1May 27, 2003
Method of manufacturing MOS transistor with fluoride implantation on silicon nitride etching stop layer
UNITED MICROELECTRONICS CORP2 citations61
US6194266B1Feb 27, 2001
Method for forming a capacitor having selective hemispherical grained polysilicon
UNITED MICROELECTRONICS CORP3 citations59