Inventor

YEH PEI WEI

TW2 patents

⚠️ This page may combine multiple inventors who share the name “YEH PEI WEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

1 patent

US6206760B1Mar 27, 2001

Method and apparatus for preventing particle contamination in a polishing machine

TAIWAN SEMICONDUCTOR MFG42 citations86

APPLIED MATERIALS INC

1 patent

US6582288B2Jun 24, 2003

Diaphragm for chemical mechanical polisher

APPLIED MATERIALS INC6 citations62