Inventor

OKUMURA KATSUYA

JP297 patents

⚠️ This page may combine multiple inventors who share the name “OKUMURA KATSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OKUMURA KATSUYA

TOSHIBA KK

Multichip semiconductor device, chip therefor and method of formation thereof

Multichip semiconductor device and memory card

Method of filling contact holes and wiring grooves of a semiconductor device

Apparatus for processing semiconductor wafers

Apparatus for coating of silicon semiconductor surface

Semiconductor device having stacking structure

Aqueous dispersion, aqueous dispersion for chemical mechanical polishing used for manufacture of semiconductor devices, method for manufacture of semiconductor devices, and method for formation of embedded writing

Passive semiconductor device mounted as daughter chip on active semiconductor device

Composite particles and production process thereof, aqueous dispersion, aqueous dispersion composition for chemical mechanical polishing, and process for manufacture of semiconductor device

Chemical mechanical method of polishing wafer surfaces

Plating method and plating apparatus

Ion implantation apparatus, ion generating apparatus and semiconductor manufacturing method with ion implantation processes

Semiconductor processing system and method of using the same

Metallization structure and method for a semiconductor device

Semiconductor memory device and method of manufacturing the same

Method for designing phase-shifting masks with automatization capability

Pad condition and polishing rate monitor using fluorescence

Plasma generating device and surface processing device and method for processing wafers in a uniform magnetic field

Method of repairing defect of structure

Film forming method and film forming device

Method for manufacturing semiconductor device and polishing apparatus

Semiconductor device and method of manufacturing the same

Ion implantation apparatus, ion generating apparatus and semiconductor manufacturing method with ion implantation processes

Hot plate and semiconductor device manufacturing method using the same

Pattern forming method

Semiconductor device manufacturing method and semiconductor device

Semiconductor wafer having identification indication and method of manufacturing the same

Substrate processing method and apparatus

Method of forming liquid film

Device and method for heating substrate, and method for treating substrate

Fabrication process using a multi-layer antireflective layer

Pattern forming method using alignment from latent image or base pattern on substrate

Photo mask and apparatus for repairing photo mask

Fabrication process using a thin resist

Method of forming a shallow trench isolation structure

Method of planarizing a semiconductor workpiece surface

Plasma generating apparatus and surface processing apparatus

Focused ion beam deposition using TMCTS

Semiconductor wafer support apparatus and method

Arrangement for cleaning semiconductor wafers using mixer

Electron optic column and scanning electron microscope

TOKYO ELECTRON LTD

Method of cleaning reaction tube and exhaustion piping system in heat processing apparatus

Probe pins zero-point detecting method, and prober

Coating apparatus and coating method

Electrostatic chuck having a multilayer structure for attracting an object

EBARA CORP

Plating apparatus

Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device

Polishing apparatus including attitude controller for turntable and/or wafer carrier

TOKYO SHIBAURA ELECTRIC CO

Polishing apparatus

KABUSHKI KAISHA TOSHIBA

Method of manufacturing semiconductor device