Inventor
BRILL TODD J
US4 patents
Patents
4 patentsUS7274971B2Sep 25, 2007
Methods and apparatus for electronic device manufacturing system monitoring and control
APPLIED MATERIALS INC35 citations91
US7413069B2Aug 19, 2008
Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility
APPLIED MATERIALS INC23 citations90
US7434676B2Oct 14, 2008
Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility
APPLIED MATERIALS INC10 citations82
US8024065B2Sep 20, 2011
Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility
APPLIED MATERIALS INC4 citations60