Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility

Abstract

In a first aspect, a first method is provided for electronic device manufacturing. The first method includes the steps of (1) receiving a request to transfer a carrier from a first substrate loading station to a second substrate loading station of an electronic device manufacturing facility including a plurality of substrate loading stations, wherein the facility further includes a plurality of carrier supports coupled to a conveyor system adapted to move the carrier within the facility; (2) assigning one of the plurality of carrier supports to transfer the carrier from the first substrate loading station to the second substrate loading station such that at least one of a time required for the transfer is reduced and balance of the conveyor system is maintained; (3) moving the carrier from the first substrate loading station; and (4) moving the carrier to the second substrate loading station. Numerous other aspects are provided.

1. A method of electronic device manufacturing, comprising:
 receiving a request to transfer a carrier from a first substrate loading station to a second substrate loading station of an electronic device manufacturing facility including a plurality of substrate loading stations, wherein the facility further includes a plurality of carrier supports coupled to a conveyor system adapted to move the carrier within the facility; 
 assigning one of the plurality of carrier supports to transfer the carrier from the first substrate loading station to the second substrate loading station such that a resulting distribution of carriers on the conveyor system does not result in velocity variations along the conveyor system; 
 moving the carrier from the first substrate loading station; and 
 moving the carrier to the second substrate loading station. 
 
   
   
     2. The method of  claim 1  wherein assigning one of the plurality of carrier supports to transfer the carrier from the first substrate loading station to the second substrate loading station includes:
 selecting one of the plurality of carrier supports; and 
 determining whether employing the selected carrier support will conflict with a pending transfer. 
 
   
   
     3. The method of  claim 2  further comprising assigning the selected carrier support for transferring the carrier from the first substrate loading station to the second substrate loading station if no conflict with a pending transfer exists. 
   
   
     4. The method of  claim 2  further comprising, if a conflict exists with a pending transfer, selecting another one of the plurality of carrier supports. 
   
   
     5. The method of  claim 4  further comprising:
 determining whether employing the other selected carrier support will conflict with a pending transfer; and 
 assigning the other selected carrier support for transferring the carrier from the first substrate loading station to the second substrate loading station if no conflict with a pending transfer exists. 
 
   
   
     6. The method of  claim 2  further comprising determining whether employing the selected carrier support will unbalance the conveyor system. 
   
   
     7. The method of  claim 6  further comprising assigning the selected carrier support for transferring the carrier from the first substrate loading station to the second substrate loading station if no conflict with a pending transfer exists and the selected carrier support will not unbalance the conveyor system. 
   
   
     8. The method of  claim 7  further comprising selecting another one of the plurality of carrier supports, if a conflict exists with a pending transfer or if the selected carrier support will unbalance the conveyor system. 
   
   
     9. The method of  claim 8  further comprising:
 determining whether employing the other selected carrier support will conflict with a pending transfer; 
 determining whether employing the other selected carrier support will unbalance the conveyor system; and 
 assigning the other selected carrier support for transferring the carrier from the first substrate loading station to the second substrate loading station if no conflict with a pending transfer exists and the other selected carrier support will not unbalance the conveyor system. 
 
   
   
     10. The method of  claim 2  wherein a pending transfer includes a carrier transfer between substrate loading stations. 
   
   
     11. The method of  claim 2  wherein determining whether employing the selected carrier support will conflict with a pending transfer is based on at least one of:
 a first group of parameters including:
 a velocity of the conveyor system divided by a spacing between adjacent carrier supports coupled to the conveyor system; 
 a maximum time required by the first substrate loading station to prepare to place a carrier on the conveyor system; and 
 at least one of a maximum time required by the first substrate loading station to place a carrier onto the conveyor system and a maximum time required by the first substrate loading station to remove a carrier from the conveyor system; and 
 
 a second group of parameters including:
 the velocity of the conveyor system divided by the spacing between adjacent carrier supports coupled to the conveyor system; 
 a maximum time required by the second substrate loading station to prepare to remove a carrier from the conveyor system; and 
 at least one of a maximum time required by the second substrate loading station to place a carrier onto the conveyor system and a maximum time required by the second substrate loading station to remove a carrier from the conveyor system.