Inventor
WARNER GLADE L
US6 patents
Patents
6 patentsUS7177716B2Feb 13, 2007
Methods and apparatus for material control system interface
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US7413069B2Aug 19, 2008
Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility
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US7522969B2Apr 21, 2009
Methods and apparatus for material control system interface
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US7434676B2Oct 14, 2008
Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility
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US7603196B2Oct 13, 2009
Methods and apparatus for material control system interface
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US8024065B2Sep 20, 2011
Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility
APPLIED MATERIALS INC4 citations60