Inventor
JESSOP DANIEL R
US6 patents
Patents
6 patentsUS7177716B2Feb 13, 2007
Methods and apparatus for material control system interface
APPLIED MATERIALS INC37 citations94
US7413069B2Aug 19, 2008
Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility
APPLIED MATERIALS INC23 citations90
US7522969B2Apr 21, 2009
Methods and apparatus for material control system interface
APPLIED MATERIALS INC8 citations82
US7434676B2Oct 14, 2008
Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility
APPLIED MATERIALS INC10 citations82
US7603196B2Oct 13, 2009
Methods and apparatus for material control system interface
APPLIED MATERIALS INC5 citations72
US8024065B2Sep 20, 2011
Methods and apparatus for transferring a substrate carrier within an electronic device manufacturing facility
APPLIED MATERIALS INC4 citations60