Inventor
UEBERREITER GUIDO
DE5 patents
Patents
5 patentsUS9864831B2Jan 9, 2018
Metrology pattern layout and method of use thereof
GLOBALFOUNDRIES INC0 citations49
US9817940B2Nov 14, 2017
Method wherein test cells and dummy cells are included into a layout of an integrated circuit
GLOBALFOUNDRIES INC0 citations49
US9672312B2Jun 6, 2017
Method wherein test cells and dummy cells are included into a layout of an integrated circuit
GLOBALFOUNDRIES INC0 citations49
US9535319B2Jan 3, 2017
Reticle, system comprising a plurality of reticles and method for the formation thereof
GLOBALFOUNDRIES INC1 citations49
US9323882B2Apr 26, 2016
Metrology pattern layout and method of use thereof
GLOBALFOUNDRIES INC0 citations49