Inventor · disambiguated record

Mehrdad Moshfegh

Also filed as: MOSHFEGH MEHRDAD

1 granted patent·39 citations·filing 2002–2002

47Inventor score

Technology areasC23C

Files withAPPLIED MATERIALS INC1

Top patents by PatentIndex Score

1 record

0186US7354501B2Upper chamber for high density plasma CVDAPPLIED MATERIALS INC·Filed 2002·Granted Apr 8, 2008·39 cites·21 claims

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