Inventor · disambiguated record

Yosuke Katada

Also filed as: KATADA YOSUKE

1 granted patent·3 citations·filing 2019–2019

20Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD1

Top patents by PatentIndex Score

1 record

0178US11086286B2Substrate processing system, substrate processing method, and control programTOKYO ELECTRON LTD·Filed 2019·Granted Aug 10, 2021·3 cites·15 claims

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