Inventor
KAGAYA TAKESHI
JP4 patents
Patents
4 patentsUS7360346B2Apr 22, 2008
Purging system and purging method for the interior of a portable type hermetically sealed container
TDK CORP30 citations91
US6795202B2Sep 21, 2004
Wafer processing apparatus having wafer mapping function
TDK CORP14 citations82
US11199528B2Dec 14, 2021
Sensor built-in filter structure and wafer accommodation container
TDK CORP2 citations68
US11521879B2Dec 6, 2022
Load port apparatus, semiconductor manufacturing apparatus, and method of controlling atmosphere in pod
TDK CORP0 citations57