Inventor · disambiguated record
Hin Oh
Also filed as: OH HIN
3 granted patents·1 pending application·89 citations·filing 2003–2005
74Inventor score
Technology areasH01J
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0193US7505879B2Method for generating multivariate analysis model expression for processing apparatus, method for executing multivariate analysis of processing apparatus, control device of processing apparatus and control system for processing apparatusTOKYO ELECTRON LTD·Filed 2004·Granted Mar 17, 2009·56 cites·14 claims
- 0290US6985215B2Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2005·Granted Jan 10, 2006·25 cites·34 claims
- 0365US7101458B2Plasma processing method and apparatusTOKYO ELECTRON LTD·Filed 2003·Granted Sep 5, 2006·8 cites·8 claims
- 0436US2004235304A1Plasma treatment apparatusTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
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