Inventor

CHENG WEN-HAO

US77 patents

⚠️ This page may combine multiple inventors who share the name “CHENG WEN-HAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHENG WEN-HAO

TAIWAN SEMICONDUCTOR MFG CO LTD

Method and system for diagnosing a semiconductor wafer

Apparatus and a method of forming a particle shield

Particle remover and method

Deposition system and method

Robot blade having multiple sensors for multiple different alignment tasks

Apparatus and a method of forming a particle shield

Method and system to prepare, manufacture and inspect mask patterns for a semiconductor device

Systems and methods for systematic physical failure analysis (PFA) fault localization

Semiconductor device

Systems and methods for systematic physical failure analysis (PFA) fault localization

Redistribution layer metallic structure and method

Redistribution layer metallic structure and method

Bonding pad process with protective layer

Apparatus and a method of forming a particle shield

Hierarchical density uniformization for semiconductor feature surface planarization

Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereof

Compact optical resonator with enhancement features

Optical ring resonators

Photonic circuitry having stacked optical resonators

Apparatus and a method of forming a particle shield

Apparatus and a method of forming a particle shield

Deposition system and method

Systems and methods for systematic physical failure analysis (PFA) fault localization

System and method for measuring magnetic fields in PVD system

Multi-functional shutter disk for thin film deposition chamber

Method for depositing target material in deposition chamber with tiltable workpiece holder

Deposition system and method

Particle remover and method

Deposition system and method

Deposition system and method

Target for MRAM

Redistribution layer metallic structure and method

Semiconductor device and method of forming the same

System and method for detecting abnormality of thin-film deposition process

Providing multifunctional shutter disk above the workpiece in the multifunctional chamber during degassing or pre-cleaning of the workpiece, and storing the multifunctional shutter disc during deposition process in the same multifunctional chamber

Deposition system and method

Movable wafer holder for film deposition chamber having six degrees of freedom

Deposition system and method

System and method for heating semiconductor wafers

TAIWAN SEMICONDUCTOR MFG

Method and system of mask data preparation for curvilinear mask patterns for a device

Three-dimensional semiconductor image reconstruction apparatus and method

Three-dimensional semiconductor image reconstruction apparatus and method

INTEL CORP

Active secondary exposure mask to manufacture integrated circuits

Modifying circuitry features in radiation sensitive layers with active secondary exposure masks

Manufacturable chromeless alternating phase shift mask structure with phase grating

GENEREACH BIOTECHNOLOGY CORP

Biochemical reactor

Heating device and biochemical reactor having the same

CHENG WEN-HAO

Viral updating of software based on neighbor software information

ALCOR MICRO CORP

Flash memory storage device and read/write method

VIA TECH INC

Hub devices and methods for initializing hub device