Inventor

ZANARDO RENZO

LI3 patents

Patents

3 patents

US4990047AFeb 5, 1991

Vacuum apparatus

BALZERS HOCHVAKUUM126 citations93

US5090900AFeb 25, 1992

Workpiece support for vacuum chamber

BALZERS HOCHVAKUUM50 citations91

US5037262AAug 6, 1991

Holding device for a disk and application therefor

BALZERS HOCHVAKUUM42 citations90