Holding device for a disk and application therefor

Abstract

A holding device for semiconductor disks or wafers orients and secures the disk during transport to a working position. Shortly before the disk reaches a working position the device releases the surface to be worked or secures the disk position with the aid of a ring which remains in the working position. Thereby the disk surface can be worked completely or with minimal shadowing and simultaneously the transport mechanics can be effectively protected against the working process, for example coating or etching. All parts continuously exposed to the working process can be readily exchanged. If the disk remains adhered in the working station, it is torn off by a form-fitting transport securement.

What is claimed is: 
     
       1. An arrangement for holding a disk in a vacuum treatment chamber, comprising: a movable support with a support surface for the disk;   a rigid holding frame having an opening therein for the disk as the disk moves into the vacuum chamber by the movable support;   the rigid holding frame comprising engagement means extending inwardly of the opening for engaging the disk as the disk moves through the opening of the frame; and   rest means for supporting the frame and for allowing lift-off movement of the frame from the rest means, the disk being movable for engaging the engagement means and for lifting off the rigid holding frame the rigid holding frame returning to the rest means as the mobile support moves the disk out of the vacuum chamber.   
     
     
       2. The arrangement of claim 1 including means for lifting the support surface into the opening of the rigid holding frame for engaging the engagement means by the disk. 
     
     
       3. The arrangement of claim 2 wherein said engagement means comprise at least three engagement members distributed around and extending inwardly of said frame opening. 
     
     
       4. The arrangement of claim 1 wherein said frame has a selected weight so that said engagement means bear down on the disk by a selected force when the disk is engaged with said engagement means. 
     
     
       5. The arrangement of claim 1 including at least one gas feed line connected to said support for supplying gas between said support surface and the disk, the gas between said support surface and the disk urging the disk against said engagement means when the disk is engaged with said engagement means. 
     
     
       6. The arrangement of claim 5 including a plurality of bores through said support surface, said bores being connected to said gas feed line for supplying the gas. 
     
     
       7. The arrangement of claim 6 including a gas distribution chamber in said support between said gas feed line and said plurality of bores for distributing gas among said plurality of bores. 
     
     
       8. The arrangement of claim 7 including positioning means operating around said support surface for positioning the disk at a selected position on said support surface. 
     
     
       9. The arrangement of claim 8, wherein: said support and support surface are movable to bring the disk into a working position in the treatment chamber for treatment of the disk;   said positioning means including at least three positioning members located around said support surface and mutually movable toward each other into an engagement position for engaging and positioning the disk on said support surface and away from each other into a respective release position for releasing the disk on said support surface;   further comprising drive means connected to said positioning members for mutually moving said positioning members between said engagement and release positions; and   further comprising a cover with at least one surface exposed to the treatment chamber, said cover being positioned for concealing said at least three positioning members from said treatment, when said positioning members are in said release position.   
     
     
       10. The arrangement of claim 9, wherein said positioning members are each pivotally mounted with respect to said support on respective first axes, substantially parallel to a direction of said movement of said support surface, for mutual movement between said engagement and release positions. 
     
     
       11. The arrangement of claim 10, wherein each of said positioning members includes a contact portion for engaging the disk, each contact portion being mounted for rotation about a second axis which is arranged substantially parallel to and offset from respective ones of said first axes. 
     
     
       12. The arrangement of claim 11, wherein each of said positioning members is coupled to a telescopic shaft, said arrangement further comprising spring means engaged to said telescopic shaft for exerting a biasing force to extend said telescopic shaft, said lifting means urging said positioning members against said cover as said support surface moves toward said working position, for compressing each telescopic shaft against the biasing force of said spring means. 
     
     
       13. The arrangement of claim 9, including bearing means for moving each positioning member between said engagement and release positions, each bearing means being positioned outside of said treatment chamber when said disk is in said working position. 
     
     
       14. The arrangement of claim 9, wherein said positioning members each include a first engaging surface for engaging a periphery of the disk on said support surface, said first engaging surfaces of said positioning members extending substantially perpendicularly to said support surface. 
     
     
       15. The arrangement of claim 9, each positioning member comprising an engaging surface extending substantially parallel to said support surface and engagable over a substantially planar surface of the disk when said positioning members are in said engagement position, for tearing the disk off said holding frame when said support surface moves said disk from said working position. 
     
     
       16. The arrangement of claim 9, wherein said positioning members are mounted for lateral movement with respect to said support surface. 
     
     
       17. The arrangement of claim 9, including lifting means for moving said support to move said disk into and from said working position, said drive means mutually moving said positioning members synchronized with said moving of said support by said drive means. 
     
     
       18. The arrangement of claim 17, wherein said drive means moves said positioning members toward said respective release positions before said lifting means moves said disk into said working position. 
     
     
       19. The arrangement of claim 17, wherein said treatment chamber includes an opening through which said lifting means moves said support for bringing said disk into said working position in said treatment chamber, the arrangement including value means for clasing said opening in a vacuum-tight manner as said support is moved toward said working position, said value means being moved by said lifting means. 
     
     
       20. The arrangement of claim 17, wherein said drive means moves said positioning members toward said engagement working position so that the disk is positioned on said support surface during movement of said support toward said working position. 
     
     
       21. The arrangement of claim 17, wherein said treatment chamber includes an opening through which said support passes when said lifting means moves said support toward said working position, said cover being positioned around said opening and including a second opening coaxial to said opening of said treatment chamber, said support being smaller than said second opening in said cover so that with said disk in said working position, said support is spaced from said cover, the lateral extent of said opening in said cover being smaller than the combined lateral extent of said support and said positioning members. 
     
     
       22. The arrangement of claim 6, wherein said bores have a cross-sectional diameter substantially smaller than their axial extent. 
     
     
       23. The arrangement of claim 6, wherein said bores are evenly distributed along said support surface. 
     
     
       24. The arrangement of claim 5, including heating means in said support for heating the disk. 
     
     
       25. The arrangement of claim 5, including cooling means in said support for cooling the disk. 
     
     
       26. The arrangement of claim 1, wherein said treatment chamber includes an opening, and further comprising lifting means for moving said support, said support passing through said opening as said lifting means moves said support toward a working position for treatment of the disk, said rest means being formed by wall means of said treatment chamber adjacent said opening, said holding frame being movable with the disk and from said wall means when the disk engages said engagement means as said support moves to said working position. 
     
     
       27. The arrangement of claim 26, a gap being formed between said support and said wall means, said holding frame being structured to shield said gap. 
     
     
       28. The arrangement of claim 1, wherein said engagement means comprise hooks projecting inwardly with respect to said opening and being distributed around said opening. 
     
     
       29. The arrangement of claim 1, further comprising movable members linked to said support and movable parallel to said support surface mutually toward and from each other, said members engaging the disk engaged to said engagement means of said frame, so as to tear the disk off said frame as said support is retracted from said frame. 
     
     
       30. The arrangement of claim 1, further comprising positioning surfaces for positioning the disk on said support surface as it engages said positioning surfaces, said positioning surfaces being provided adjacent said opening of said frame. 
     
     
       31. The arrangement of claim 1, wherein said holding frame is structured for engaging the disk to preclude lateral movement of the disk laterally of said support surface.