Inventor
MAKINOUCHI SUSUMU
JP36 patents
⚠️ This page may combine multiple inventors who share the name “MAKINOUCHI SUSUMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
25 patentsUS5969800AOct 19, 1999
Scanning exposure apparatus and method
NIKON CORP76 citations96
US5907392AMay 25, 1999
Exposure apparatus
NIKON CORP47 citations96
US5699145ADec 16, 1997
Scanning type exposure apparatus
NIKON CORP65 citations96
US5446519AAug 29, 1995
Stage device
NIKON CORP72 citations96
US4860374AAug 22, 1989
Apparatus for detecting position of reference pattern
NIKON CORP109 citations96
US4801977AJan 31, 1989
Projection optical apparatus
NIKON CORP63 citations96
US6260282B1Jul 17, 2001
Stage control with reduced synchronization error and settling time
NIKON CORP84 citations94
US6490025B1Dec 3, 2002
Exposure apparatus
NIKON CORP36 citations93
US6259511B1Jul 10, 2001
Scanning type exposure apparatus
NIKON CORP24 citations93
US5483311AJan 9, 1996
Projection exposure apparatus
NIKON CORP29 citations93
US5343270AAug 30, 1994
Projection exposure apparatus
NIKON CORP40 citations93
US6188464B1Feb 13, 2001
Exposure apparatus
NIKON CORP32 citations92
US5978071ANov 2, 1999
Projection exposure apparatus and method in which mask stage is moved to provide alignment with a moving wafer stage
NIKON CORP43 citations92
US5742376AApr 21, 1998
Projection exposure apparatus and projection exposure method
NIKON CORP46 citations92
US5677754AOct 14, 1997
Scanning exposure apparatus
NIKON CORP41 citations92
US4958082ASep 18, 1990
Position measuring apparatus
NIKON CORP30 citations92
US6633363B1Oct 14, 2003
Scanning exposure apparatus and method
NIKON CORP6 citations74
US5777721AJul 7, 1998
Exposure method and apparatus with control of a linear motor
NIKON CORP10 citations74
US5714860AFeb 3, 1998
Stage device capable of applying a damping force to a movable member
NIKON CORP8 citations74
US7723671B2May 25, 2010
Positional information detecting device
NIKON CORP2 citations63
US7601947B2Oct 13, 2009
Encoder that optically detects positional information of a scale
NIKON CORP5 citations63
US6646715B1Nov 11, 2003
Scanning exposure apparatus and method with run-up distance control
NIKON CORP5 citations63
US7932996B2Apr 26, 2011
Exposure apparatus, exposure method, and device fabrication method
NIKON CORP2 citations62
US8796613B2Aug 5, 2014
Encoder apparatus using liquid to suppress detection failure
NIKON CORP0 citations52
US6337733B1Jan 8, 2002
Apparatus including a motor-driven stage for exposing a photosensitive substrate, and method of making such apparatus
NIKON CORP1 citations52
MAKINOUCHI SUSUMU
7 patentsUS8760622B2Jun 24, 2014
Movable body apparatus, exposure apparatus and pattern formation apparatus, and device manufacturing method
MAKINOUCHI SUSUMU15 citations83
US8208128B2Jun 26, 2012
Position measuring system and position measuring method, Movable body apparatus, movable body drive method, exposure apparatus and exposure method, pattern forming apparatus, and device manufacturing method
MAKINOUCHI SUSUMU12 citations83
US8395110B2Mar 12, 2013
Encoder apparatus using liquid to suppress detection failure
MAKINOUCHI SUSUMU2 citations62
US8222594B2Jul 17, 2012
Encoder that optically detects positional information of a movable body by changing a path length through periodic oscillation of an optical element
MAKINOUCHI SUSUMU2 citations62
US8390780B2Mar 5, 2013
Movable-body apparatus, exposure apparatus, exposure method, and device manufacturing method
MAKINOUCHI SUSUMU1 citations52
US8710426B2Apr 29, 2014
Encoder that detects positional information of a moving body generating interference fringes that move in opposite directions
MAKINOUCHI SUSUMU0 citations41
US8710425B2Apr 29, 2014
Encoder that optically detects positional information of a moving body from different optical paths lengths
MAKINOUCHI SUSUMU0 citations41