Inventor
SHIGA AIKO
JP39 patents
⚠️ This page may combine multiple inventors who share the name “SHIGA AIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMICONDUCTOR ENERGY LAB
32 patentsUS6700096B2Mar 2, 2004
Laser apparatus, laser irradiation method, manufacturing method for semiconductor device, semiconductor device, production system for semiconductor device using the laser apparatus, and electronic equipment
SEMICONDUCTOR ENERGY LAB100 citations98
US7105048B2Sep 12, 2006
Laser irradiation apparatus
SEMICONDUCTOR ENERGY LAB46 citations96
US6911358B2Jun 28, 2005
Method for manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB63 citations96
US6797550B2Sep 28, 2004
Semiconductor device and manufacturing method therefor
SEMICONDUCTOR ENERGY LAB68 citations96
US6764886B2Jul 20, 2004
Manufacturing method of semiconductor device
SEMICONDUCTOR ENERGY LAB43 citations96
US7319055B2Jan 15, 2008
Method of fabricating a semiconductor device utilizing crystallization of semiconductor region with laser beam
SEMICONDUCTOR ENERGY LAB16 citations93
US7138306B2Nov 21, 2006
Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB23 citations93
US7135389B2Nov 14, 2006
Irradiation method of laser beam
SEMICONDUCTOR ENERGY LAB23 citations93
US7109069B2Sep 19, 2006
Semiconductor device and method of manufacturing the same
SEMICONDUCTOR ENERGY LAB18 citations93
US7050878B2May 23, 2006
Semiconductror fabricating apparatus
SEMICONDUCTOR ENERGY LAB25 citations93
US6979605B2Dec 27, 2005
Manufacturing method for a semiconductor device using a marker on an amorphous semiconductor film to selectively crystallize a region with a laser light
SEMICONDUCTOR ENERGY LAB24 citations93
US6962860B2Nov 8, 2005
Method of manufacturing a semiconductor device
SEMICONDUCTOR ENERGY LAB53 citations93
US6844523B2Jan 18, 2005
Laser apparatus, laser irradiation method, manufacturing method for a semiconductor device, semiconductor device and electronic equipment
SEMICONDUCTOR ENERGY LAB36 citations93
US7129121B2Oct 31, 2006
Method for manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB13 citations84
US6777713B2Aug 17, 2004
Irregular semiconductor film, having ridges of convex portion
SEMICONDUCTOR ENERGY LAB13 citations84
US7943885B2May 17, 2011
Laser irradiation method and method of manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB6 citations74
US7510920B2Mar 31, 2009
Manufacturing method for a thin film transistor that uses a pulse oscillation laser crystallize an amorphous semiconductor film
SEMICONDUCTOR ENERGY LAB7 citations74
US7439115B2Oct 21, 2008
Semiconductor fabricating apparatus
SEMICONDUCTOR ENERGY LAB6 citations74
US7279372B2Oct 9, 2007
Manufacturing method of semiconductor device
SEMICONDUCTOR ENERGY LAB8 citations74
US6767799B2Jul 27, 2004
Laser beam irradiation method
SEMICONDUCTOR ENERGY LAB8 citations74
US10366885B2Jul 30, 2019
Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB2 citations73
US9748099B2Aug 29, 2017
Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB2 citations73
US7829432B2Nov 9, 2010
Method for manufacturing SOI substrate
SEMICONDUCTOR ENERGY LAB6 citations73
US10910219B2Feb 2, 2021
Laser irradiation method and laser irradiation device and method of manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB0 citations63
US7892952B2Feb 22, 2011
Laser apparatus, laser irradiation method, manufacturing method for semiconductor device, semiconductor device, production system for semiconductor device using the laser apparatus, and electronic equipment
SEMICONDUCTOR ENERGY LAB3 citations63
US7736917B2Jun 15, 2010
Laser beam irradiation method and method of manufacturing a thin firm transistor
SEMICONDUCTOR ENERGY LAB1 citations63
US7635883B2Dec 22, 2009
Method for manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB2 citations63
US7589032B2Sep 15, 2009
Laser apparatus, laser irradiation method, semiconductor manufacturing method, semiconductor device, and electronic equipment
SEMICONDUCTOR ENERGY LAB3 citations63
US7176042B2Feb 13, 2007
Laser beam irradiation method that includes determining a thickness of semiconductor prior to crystallizing
SEMICONDUCTOR ENERGY LAB1 citations63
US7037809B2May 2, 2006
Method of manufacturing semiconductor device using a laser irradiation process
SEMICONDUCTOR ENERGY LAB2 citations63
US8044372B2Oct 25, 2011
Laser apparatus, laser irradiation method, semiconductor manufacturing method, semiconductor device, and electronic equipment
SEMICONDUCTOR ENERGY LAB0 citations52
US7670935B2Mar 2, 2010
Manufacturing method of semiconductor device
SEMICONDUCTOR ENERGY LAB0 citations52
SHARP KK
3 patentsUS7087504B2Aug 8, 2006
Method of manufacturing a semiconductor device by irradiating with a laser beam
SHARP KK16 citations93
US7217952B2May 15, 2007
Method of manufacturing a semiconductor device and semiconductor manufacturing apparatus
SHARP KK6 citations74
US7015079B2Mar 21, 2006
Semiconductor film, semiconductor device, and method of manufacturing the same including adding metallic element to the amorphous semiconductor film and introducing oxygen after crystallization
SHARP KK4 citations63