Inventor · disambiguated record

Doug Broeke

Also filed as: BROEKE DOUG VAN DEN

2 granted patents·89 citations·filing 1999–2003

62Inventor score

Technology areasG03F H10P

Files withASML MASKTOOLS BV1

Top patents by PatentIndex Score

2 records

0186US6139994AUse of intersecting subresolution features for microlithographyFiled 1999·Granted Oct 31, 2000·87 cites·33 claims
0246US7211815B2Method of achieving CD linearity control for full-chip CPL manufacturingASML MASKTOOLS BV·Filed 2003·Granted May 1, 2007·2 cites·21 claims

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