Inventor

NAKAGAKI RYO

JP47 patents

⚠️ This page may combine multiple inventors who share the name “NAKAGAKI RYO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NAKAGAKI RYO

HITACHI HIGH TECH CORP

Defect classifier using classification recipe based on connection between rule-based and example-based classifiers

SEM-type reviewing apparatus and a method for reviewing defects using the same

Method of observing exposure condition for exposing semiconductor device and its apparatus and method of manufacturing semiconductor device

Method and apparatus for reviewing defects

Method and system for observing a specimen using a scanning electron microscope

Method and apparatus for reviewing defects of semiconductor device

Scanning electron microscope and system for inspecting semiconductor device

Measuring method and its apparatus

Electron microscope, measuring method using the same, electron microscope system, and method for controlling the system

System and method for evaluating a semiconductor device pattern, method for controlling process of forming a semiconductor device pattern and method for monitoring a semiconductor device manufacturing process

Scanning electron microscope and a method for evaluating accuracy of repeated measurement using the same

Transmission electron microscope system and method of inspecting a specimen using the same

Sample dimension-measuring method and charged particle beam apparatus

Method for measuring three dimensional shape of a fine pattern

Method for controlling charged particle beam, and charged particle beam apparatus

Defect observation method and defect observation device

Defect observation method and defect observation device

Method and apparatus for reviewing defects

Method for controlling charged particle beam, and charged particle beam apparatus

Method for measuring overlay and measuring apparatus, scanning electron microscope, and GUI

Method for measuring overlay and measuring apparatus, scanning electron microscope, and GUI

Charged-particle radiation apparatus

Defect analysis assistance device, program executed by defect analysis assistance device, and defect analysis system

Charged particle beam apparatus

Defect classification apparatus and defect classification method

HITACHI LTD

Scanning electron microscope having magnification switching control

Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus

Image classification method, observation method, and apparatus thereof with different stage moving velocities

Inspecting method, inspecting system, and method for manufacturing electronic devices

Method and its apparatus for inspecting a specimen

Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus

NAKAGAKI RYO

Defect classifier using classification recipe based on connection between rule-based and example-based classifiers

Defect classifier using classification recipe based on connection between rule-based and example-based classifiers

Defect review method and apparatus

Region-of-interest determination apparatus, observation tool or inspection tool, region-of-interest determination method, and observation method or inspection method using region-of-interest determination method

Method and apparatus for reviewing defects

HARADA MINORU

Method and its apparatus for reviewing defects

Inspection method and device therefor

Method and apparatus for reviewing defects

Defect observation method and defect observation apparatus

MINEKAWA YOHEI

Defect classification method, and defect classification system

Method and apparatus for reviewing defect

Defect observation method and defect observation device

TAKAGI YUJI

Method and device for testing defect using SEM

KURIHARA MASAKI

Method and apparatus for reviewing defects of semiconductor device

IKEDA YOKO

Inspecting method, inspecting system, and method for manufacturing electronic devices

KOTAKI GO

Defect observation method and device using SEM