Inspecting method, inspecting system, and method for manufacturing electronic devices

Abstract

A method for classifying defects, including: calculating feature quantifies of defect image which is obtained by imaging a defect on a sample; classifying the defect image into a classified category by using information on the calculated feature quantities; displaying the classified defect image in a region on a display screen which is defined to the classified category; adding information on the classified category to the displayed defect image; transferring the displayed defect image which is added the information on the classified category to one of the other categories and displaying the transferred defect image in a region on the display screen which is defined to the one of the other categories; and changing information on the category.

What is claimed is: 
     
       1. A computerized method for classifying defects, comprising:
 calculating feature quantities of a plurality of defect images which are obtained by imaging defects on a sample using an image detecting device; 
 automatically classifying each of said defect images respectively into one of a plurality of categories based on a predetermined function, by using information on said calculated feature quantities; 
 displaying all of said classified defect images, which have been automatically classified, respectively in different regions in each classified category based upon the calculated feature quantities of each of the defect images, wherein all of the defect images and all of the categories are simultaneously displayed on a same display screen with the defect images respectively grouped in different ones of the categories based upon the calculated feature quantities for each defect; 
 in the event of a need to reclassify one of the defect images, moving said one defect image from a previously classified category to another classified category to correct the category of the moved defect image; and 
 associating classified category information of said another classified category with data of said displayed moved defect image. 
 
     
     
       2. A computerized method for classifying defects according to the  claim 1 ,
 wherein said same display screen is screen of a PC, and said moving of said one defect image is effected by a drag and drop operation by a mouse of said PC, on said same display screen. 
 
     
     
       3. A computerized method for classifying defects according to the  claim 1 , wherein in the calculating, said feature quantities includes a size, color and shape of said defect image. 
     
     
       4. A computerized method according to  claim 1 , wherein said predetermined function classifies each of the defect images based on at least one of gray scale value, shape and size of the defect image. 
     
     
       5. A computerized method for classifying defects, comprising:
 displaying all of a plurality of classified defect images, which have been automatically classified, respectively in different regions in one of a plurality of classified categories based upon calculated feature quantities of each of the defect images, wherein all of the defect images and all of the categories are simultaneously displayed on a same display screen with the defect images respectively grouped in different ones of the categories based upon the calculated feature quantities for each defect, 
 in the event of a need to reclassify one of the defect images, moving said one defect image from a previously classified category to another classified category to correct the category of the moved defect image; and 
 associating classified category information of said another classified category with data of said displayed moved defect image. 
 
     
     
       6. A computerized method for classifying defects according to the  claim 5 ,
 wherein said display screen is screen of a PC, and said moving of said one defect image is effected by a drag and drop operation by a mouse of said PC, on said same display screen. 
 
     
     
       7. A computerized method for classifying defects according to the  claim 5 ,
 wherein said data of said displayed defect image includes features of said defect image which are not modified by moving said displayed defect image to said another category-region on the same display screen. 
 
     
     
       8. A computerized method for classifying defects according to the  claim 7 , wherein said data of said displayed defect image includes a size, color and shape of said defect image. 
     
     
       9. A computerized method according to  claim 5 , wherein said predetermined function classifies each of the defect images based on at least one of gray scale value, shape and size of the defect image. 
     
     
       10. An apparatus for classifying defects, comprising:
 a feature calculating unit which is configured to calculate feature quantities of a plurality of defect images which are obtained by imaging defects on a sample using an image detecting device; 
 an automatic defect classifying unit configured to automatically classify each of said defect images respectively into one of a plurality of categories based on a predetermined function, by using information on said calculated feature quantities; 
 a display unit configured to display all of said classified defect images, which have been automatically classified, respectively in different regions in each classified category based upon the calculated feature quantities of each of the defect images, wherein all of the defect images and all of the categories are simultaneously displayed on a same display screen with the defect images respectively grouped in different ones of the categories based upon the calculated feature quantities for each defect; 
 a moving unit which, in the event of a need to reclassify one of the defect images, is configured to move said one defect image from a previously classified category to another classified category to correct the category of the moved defect image; and 
 an associating unit to associate classified category information of said another classified category with data of said displayed moved defect image. 
 
     
     
       11. An apparatus for classifying defects according to the  claim 10 , wherein said display is a display of a PC, and said moving unit includes a mouse of said PC. 
     
     
       12. An apparatus for classifying defects according to the  claim 10 , further comprising a memory configured to store said calculated feature quantities including a size, color and shape of said defect image. 
     
     
       13. An apparatus according to  claim 10 , wherein said predetermined function classifies each of the defect images based on at least one of gray scale value, shape and size of the defect image.