Inventor
OZAWA YASUHIKO
JP28 patents
⚠️ This page may combine multiple inventors who share the name “OZAWA YASUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
20 patentsUS7026615B2Apr 11, 2006
Semiconductor inspection system
HITACHI LTD65 citations98
US6476388B1Nov 5, 2002
Scanning electron microscope having magnification switching control
HITACHI LTD95 citations97
US6627888B2Sep 30, 2003
Scanning electron microscope
HITACHI LTD30 citations96
US6864493B2Mar 8, 2005
Charged particle beam alignment method and charged particle beam apparatus
HITACHI LTD36 citations93
US7235782B2Jun 26, 2007
Semiconductor inspection system
HITACHI LTD43 citations92
US7068834B1Jun 27, 2006
Inspecting method, inspecting system, and method for manufacturing electronic devices
HITACHI LTD35 citations92
US6553323B1Apr 22, 2003
Method and its apparatus for inspecting a specimen
HITACHI LTD21 citations92
US7062081B2Jun 13, 2006
Method and system for analyzing circuit pattern defects
HITACHI LTD31 citations91
US6756589B1Jun 29, 2004
Method for observing specimen and device therefor
HITACHI LTD29 citations90
US7605381B2Oct 20, 2009
Charged particle beam alignment method and charged particle beam apparatus
HITACHI LTD9 citations84
US6872943B2Mar 29, 2005
Method for determining depression/protrusion of sample and charged particle beam apparatus therefor
HITACHI LTD10 citations74
US6803573B2Oct 12, 2004
Scanning electron microscope
HITACHI LTD6 citations74
US7181060B2Feb 20, 2007
Defect inspection method
HITACHI LTD9 citations72
US7439505B2Oct 21, 2008
Scanning electron microscope
HITACHI LTD2 citations63
US7166840B2Jan 23, 2007
Method for determining depression/protrusion of sample and charged particle beam apparatus therefor
HITACHI LTD3 citations63
US7002151B2Feb 21, 2006
Scanning electron microscope
HITACHI LTD2 citations63
US4844077AJul 4, 1989
NMR imaging method
HITACHI LTD3 citations63
US7352890B2Apr 1, 2008
Method for analyzing circuit pattern defects and a system thereof
HITACHI LTD3 citations61
US7356177B2Apr 8, 2008
Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus
HITACHI LTD0 citations52
USRE34495EJan 4, 1994
NMR imaging method
HITACHI LTD1 citations52