Inventor
IWATA HISAFUMI
JP16 patents
⚠️ This page may combine multiple inventors who share the name “IWATA HISAFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
11 patentsUS5278012AJan 11, 1994
Method for producing thin film multilayer substrate, and method and apparatus for detecting circuit conductor pattern of the substrate
HITACHI LTD237 citations97
US5684565ANov 4, 1997
Pattern detecting method, pattern detecting apparatus, projection exposing apparatus using the same and exposure system
HITACHI LTD57 citations96
US5293538AMar 8, 1994
Method and apparatus for the inspection of defects
HITACHI LTD80 citations96
US6611728B1Aug 26, 2003
Inspection system and method for manufacturing electronic devices using the inspection system
HITACHI LTD71 citations95
US5059559AOct 22, 1991
Method of aligning and bonding tab inner leads
HITACHI LTD88 citations94
US7068834B1Jun 27, 2006
Inspecting method, inspecting system, and method for manufacturing electronic devices
HITACHI LTD35 citations92
US6826735B2Nov 30, 2004
Inspection data analysis program, defect inspection apparatus, defect inspection system and method for semiconductor device
HITACHI LTD34 citations90
US6775817B2Aug 10, 2004
Inspection system and semiconductor device manufacturing method
HITACHI LTD37 citations89
US7426023B2Sep 16, 2008
Method and apparatus for detecting defects
HITACHI LTD13 citations84
US6687633B2Feb 3, 2004
Inspection system, inspection apparatus, inspection program, and production method of semiconductor devices
HITACHI LTD13 citations84
US6539272B1Mar 25, 2003
Electric device inspection method and electric device inspection system
HITACHI LTD10 citations72