Inventor

OBARA KENJI

JP50 patents

⚠️ This page may combine multiple inventors who share the name “OBARA KENJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OBARA KENJI

HITACHI HIGH TECH CORP

Inspection method for semiconductor wafer and apparatus for reviewing defects

Method and apparatus for reviewing defects

Method and system for observing a specimen using a scanning electron microscope

Scanning electron microscope

Automatic defect review and classification system

Scanning microscope

Automatic defect review and classification system

Scanning electron microscope

Method and apparatus for reviewing defect of subject to be inspected

Imaging method

Charged particle beam apparatus

Scanning electron microscope and a method for adjusting a focal point of an electron beam of said scanning electron microscope

Method and apparatus for collecting defect images

Charged-particle radiation apparatus

Defect analysis assistance device, program executed by defect analysis assistance device, and defect analysis system

Charged particle beam apparatus

Defect review and classification system

Defect review apparatus and method of reviewing defects

Charged particle beam device and method for analyzing defect therein

Review method and review device

HITACHI LTD

Scanning electron microscope having magnification switching control

Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus

Inspecting method, inspecting system, and method for manufacturing electronic devices

Method and apparatus for inspecting defects in a semiconductor wafer

Method and apparatus for inspecting defects in a semiconductor wafer

Method and apparatus for analyzing defect information

Method and its apparatus for inspecting a specimen

Method for observing specimen and device therefor

Method and apparatus for analyzing composition of defects

Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus

HARADA MINORU

Method and its apparatus for reviewing defects

Method and apparatus for reviewing defects

Defect observation method and defect observation apparatus

HIRAI TAKEHIRO

Charged particle beam apparatus that performs image classification assistance

Defect review apparatus and method of reviewing defects

Surface observation apparatus and surface observation method

YAMAGUCHI KOHEI

Defect inspection tool and method of parameter tuning for defect inspection tool

Scanning electron microscope

SATOU NORIO

Pattern defect analysis equipment, pattern defect analysis method and pattern defect analysis program

Pattern defect analysis equipment, pattern defect analysis method and pattern defect analysis program

TOYOTA BOSHOKU KK

Structure of attaching monitor panel

OBARA KENJI

Inspection method for semiconductor wafer and apparatus for reviewing defects

IKEDA YOKO

Inspecting method, inspecting system, and method for manufacturing electronic devices

NAKAGAKI RYO

Region-of-interest determination apparatus, observation tool or inspection tool, region-of-interest determination method, and observation method or inspection method using region-of-interest determination method

ADVANTEST CORP

Power supply circuit

TAKAHASHI NORITSUGU

Defect review system and method, and program

MIYAKE KOZO

Charged particle beam device, defect observation device, and management server

NIPPON FILCON KK

Manufacturing method of a microchemical chip made of a resin

BAN NAOMA

Observation method and observation device