Inventor
ISOGAI SEIJI
JP18 patents
⚠️ This page may combine multiple inventors who share the name “ISOGAI SEIJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
14 patentsUS6476388B1Nov 5, 2002
Scanning electron microscope having magnification switching control
HITACHI LTD95 citations97
US6542830B1Apr 1, 2003
Process control system
HITACHI LTD93 citations96
US7113628B1Sep 26, 2006
Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus
HITACHI LTD54 citations95
US7068834B1Jun 27, 2006
Inspecting method, inspecting system, and method for manufacturing electronic devices
HITACHI LTD35 citations92
US6792359B2Sep 14, 2004
Method for inspecting defect and system therefor
HITACHI LTD29 citations92
US7062081B2Jun 13, 2006
Method and system for analyzing circuit pattern defects
HITACHI LTD31 citations91
US6757621B2Jun 29, 2004
Process management system
HITACHI LTD35 citations91
US6756589B1Jun 29, 2004
Method for observing specimen and device therefor
HITACHI LTD29 citations90
US7010447B2Mar 7, 2006
Method for inspecting defect and system therefor
HITACHI LTD6 citations74
US7352890B2Apr 1, 2008
Method for analyzing circuit pattern defects and a system thereof
HITACHI LTD3 citations61
US6978041B2Dec 20, 2005
Review work supporting system
HITACHI LTD2 citations58
US7558683B2Jul 7, 2009
Method for inspecting defect and system therefor
HITACHI LTD0 citations52
US7356177B2Apr 8, 2008
Defect image classifying method and apparatus and a semiconductor device manufacturing process based on the method and apparatus
HITACHI LTD0 citations52
US7305314B2Dec 4, 2007
Method for inspecting defect and system therefor
HITACHI LTD0 citations52