Inventor

GOEDECKE UWE

DE3 patents

⚠️ This page may combine multiple inventors who share the name “GOEDECKE UWE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

2 patents

USRE40743EJun 16, 2009

Projection exposure system having a reflective reticle

ZEISS CARL SMT AG13 citations81

US7212289B1May 1, 2007

Interferometric measurement device for determining the birefringence in a transparent object

ZEISS CARL SMT AG0 citations39

ZEISS STIFTUNG

1 patent

US6590718B2Jul 8, 2003

Projection exposure system having a reflective reticle

ZEISS STIFTUNG42 citations89