Inventor

MUELLER HENRIETTE

DE3 patents

⚠️ This page may combine multiple inventors who share the name “MUELLER HENRIETTE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT AG

2 patents

USRE40743EJun 16, 2009

Projection exposure system having a reflective reticle

ZEISS CARL SMT AG13 citations81

US7002694B2Feb 21, 2006

Interferometer system and method for recording an interferogram using weighted averaging over multiple frequencies, and method for providing and manufacturing an object having a target surface

ZEISS CARL SMT AG11 citations79

ZEISS STIFTUNG

1 patent

US6590718B2Jul 8, 2003

Projection exposure system having a reflective reticle

ZEISS STIFTUNG42 citations89