Inventor

CHANG HUI-CHENG

TW27 patents

⚠️ This page may combine multiple inventors who share the name “CHANG HUI-CHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHANG HUI-CHENG

TAIWAN SEMICONDUCTOR MFG CO LTD

Method for manufacturing semiconductor device

Semiconductor device and method of manufacturing the same

Method of making a silicide beneath a vertical structure

Vertical structure having an etch stop over portion of the source

Method of forming channel of gate structure

Method of modifying capping layer in semiconductor structure

Semiconductor device

Semiconductor device

Method of forming MOSFET structure

Semiconductor device with multiple threshold voltage and method of fabricating the same

Method for manufacturing semiconductor device with semiconductor capping layer

Method for manufacturing semiconductor device

Method of forming MOSFET structure

Semiconductor device with multiple threshold voltage and method of fabricating the same

Gate structure

Semiconductor device having a fin shell covering a fin core

Vertical structure and method of forming semiconductor device

Fin field effect transistors having conformal oxide layers and methods of forming same

Fin field effect transistors having conformal oxide layers and methods of forming same

Fin field effect transistors having conformal oxide layers and methods of forming same

Semiconductor device and method for forming the same

Semiconductor device and method for forming the same

TAIWAN SEMICONDUCTOR MFG

Systems and methods for reducing contact resistivity of semiconductor devices

Method of forming MOSFET structure

Fin structure and method for forming the same

Vertical structure and method of forming semiconductor device

Delta doping layer in MOSFET source/drain region