Inventor
RUHLAND ERIC
US3 patents
Patents
3 patentsUS7695232B2Apr 13, 2010
Multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same
APPLIED MATERIALS INC17 citations90
US7997851B2Aug 16, 2011
Apparatus and method for a multi-level load lock chamber, transfer chamber, and robot suitable for interfacing with same
APPLIED MATERIALS INC5 citations60
USD1027120SMay 14, 2024
Seal for an assembly in a vapor deposition chamber
APPLIED MATERIALS INC0 citations56