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Seal for an assembly in a vapor deposition chamber

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Assignee: APPLIED MATERIALS INCPriority: Dec 17, 2020Filed: Dec 17, 2020Granted: May 14, 2024
Est. expiryDec 17, 2040(~14.4 yrs left)· nominal 20-yr term from priority
Inventors:Yao-Hung YangEric RuhlandSaurabh M. ChaudhariDien-Yeh WuPhilip Wayne NagleAniruddha PalSudhir GondhalekarSiamak SalimianScott LinBoon Sen Chan
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CLAIM 
     
       The ornamental design for a seal for an assembly in a vapor deposition chamber, as shown and described.

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