Inventor
TAKAHASHI SHOZO
JP4 patents
⚠️ This page may combine multiple inventors who share the name “TAKAHASHI SHOZO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
3 patentsUS11090692B2Aug 17, 2021
Cleaning liquid supplying system, substrate processing apparatus and substrate processing system
EBARA CORP0 citations50
US12594583B2Apr 7, 2026
Substrate cleaning device, substrate processing device, and maintenance method for substrate cleaning device
EBARA CORP0 citations48
US9821429B2Nov 21, 2017
Polishing pad and chemical mechanical polishing apparatus for polishing a workpiece, and method of polishing a workpiece using the chemical mechanical polishing apparatus
EBARA CORP0 citations39