Inventor · disambiguated record
Sangjun Cho
Also filed as: CHO SANGJUN
4 granted patents·14 citations·filing 2007–2017
68Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0181US7782591B2Methods of and apparatus for reducing amounts of particles on a wafer during wafer de-chuckingLAM RES CORP·Filed 2007·Granted Aug 24, 2010·9 cites·18 claims
- 0271US8283255B2In-situ photoresist strip during plasma etching of active hard maskCHO SANGJUN·Filed 2007·Granted Oct 9, 2012·4 cites·18 claims
- 0362US10546756B2Method for generating vertical profiles in organic layer etchesLAM RES CORP·Filed 2017·Granted Jan 28, 2020·1 cites·19 claims
- 0445US8912633B2In-situ photoresist strip during plasma etching of active hard maskCHO SANGJUN·Filed 2012·Granted Dec 16, 2014·0 cites·20 claims
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