Inventor

HUNTER AARON MUIR

US72 patents

⚠️ This page may combine multiple inventors who share the name “HUNTER AARON MUIR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HUNTER AARON MUIR

APPLIED MATERIALS INC

Temperature measurement and control of wafer support in thermal processing chamber

Thermally matched support ring for substrate processing chamber

Annealing apparatus using two wavelengths of radiation

System for non radial temperature control for rotating substrates

Bottom processing

Annealing apparatus using two wavelengths of radiation

Support ring with masked edge

Chambers with improved cooling devices

Support cylinder for thermal processing chamber

Light pipe window structure for low pressure thermal processes

Support ring with masked edge

In-situ temperature measurement in a noisy environment

Support ring with masked edge

Thermal processing chamber

Bottom processing

Support ring with masked edge

In-situ temperature measurement in a noisy environment

Support cylinder for thermal processing chamber

Annealing apparatus using two wavelengths of radiation

Light pipe window structure for thermal chamber applications and processes

Apparatus and methods for rapid thermal processing

Apparatus and method for measuring radiation energy during thermal processing

System for non radial temperature control for rotating substrates

Laser noise elimination in transmission thermometry

Thermal processing apparatus

Support cylinder for thermal processing chamber

Multiple beam combiner for laser processing apparatus

Top wafer rotation and support

Top wafer rotation and support

Pryometer for laser annealing system compatible with amorphous carbon optical absorber layer

Semiconductor processing chamber

Light pipe arrays for thermal chamber applications and thermal processes

Light pipe window structure for thermal chamber applications and processes

Model based lamp background filtration of stray radiation for pyrometry

Optical endpoint detection system

MOFFATT STEPHEN

Methods of solid phase recrystallization of thin film using pulse train annealing method

Multiple beam combiner for laser processing apparatus

Thermal processing apparatus

RAMACHANDRAN BALASUBRAMANIAN

Optical endpoint detection system

Method and apparatus for reducing patterning effects on a substrate during radiation-based heating

CAREY PAUL

Method of thermal processing structures formed on a substrate

Method of thermal processing structures formed on a substrate

SORABJI KHURSHED

Rapid thermal processing chamber with shower head

PATALAY KAILASH KIRAN

Pyrometry for substrate processing

ADERHOLD WOLFGANG R

System for non radial temperature control for rotating substrates

HUNTER AARON MUIR

Particle control in laser processing systems

PAN HENG

Apparatus and method to measure temperature of 3D semiconductor structures via laser diffraction

RANISH JOSEPH M

Substrate supporting edge ring with coating for improved soak performance

LI JIPING

Laser noise elimination in transmission thermometry

TERTITSKI LEONID M

Laser beam positioning system