Inventor · disambiguated record
Arunthathi Sivasothy
Also filed as: SIVASOTHY ARUNTHATHI
2 granted patents·1 pending application·15 citations·filing 2003–2007
60Inventor score
Technology areasH10W
Top patents by PatentIndex Score
3 records- 0168US7550046B2Vapor deposition system using benzotriazole (BTA) and isopropyl alcohol for protecting copper interconnectsTEXAS INSTRUMENTS INC·Filed 2007·Granted Jun 23, 2009·4 cites·7 claims
- 0267US7144802B2Vapor deposition of benzotriazole (BTA) for protecting copper interconnectsTEXAS INSTRUMENTS INC·Filed 2003·Granted Dec 5, 2006·11 cites·13 claims
- 0341US2006270233A1Vapor deposition of benzotriazole (BTA) for protecting copper interconnectsXIA CHANGFENG F·Filed 2006·Application pending·0 cites
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