Inventor · disambiguated record
Walter Swanson
Also filed as: SWANSON WALTER · SWANSON WALTER F
4 granted patents·73 citations·filing 1985–2000
79Inventor score
Top patents by PatentIndex Score
4 records- 0170US6379469B1Apparatus and method for washing substrateTOKYO ELECTRON LTD·Filed 2000·Granted Apr 30, 2002·13 cites·4 claims
- 0268US6158075AApparatus and method for washing substrateTOKYO ELECTRON LTD·Filed 1997·Granted Dec 12, 2000·32 cites·13 claims
- 0366USD293487SBar of soapSWANSON WALTER F·Filed 1985·Granted Dec 29, 1987·14 cites·1 claims
- 0448US5806319AMethod and apparatus for cryogenically cooling a deposition chamberFiled 1997·Granted Sep 15, 1998·14 cites·53 claims
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