Inventor
CHOU TSUNG-KUAN
US3 patents
Patents
3 patentsUS7354788B2Apr 8, 2008
Method for processing a MEMS/CMOS cantilever based memory storage device
INTEL CORP19 citations90
US8000216B2Aug 16, 2011
Double-electrode cantilever actuation for seek-scan-probe data access
INTEL CORP2 citations60
US7787352B2Aug 31, 2010
Method for processing a MEMS/CMOS cantilever based memory storage device
INTEL CORP2 citations60