P

Inventor

CHEN CHIH-HUNG

TW125 patents
⚠️ This page may combine multiple inventors who share the name “CHEN CHIH-HUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

14 patents
US10201887B2Feb 12, 2019

Polishing pad having grooves on bottom surface of top layer

TAIWAN SEMICONDUCTOR MFG CO LTD10 citations84
US10058974B1Aug 28, 2018

Method for controlling chemical mechanical polishing process

TAIWAN SEMICONDUCTOR MFG CO LTD10 citations84
US12131896B2Oct 29, 2024

Method for wafer backside polishing

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10391608B2Aug 27, 2019

Backside polisher with dry frontside design and method using the same

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11761751B2Sep 19, 2023

Thin film metrology

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11397078B2Jul 26, 2022

Thin film metrology

TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US11145751B2Oct 12, 2021

Semiconductor structure with doped contact plug and method for forming the same

TAIWAN SEMICONDUCTOR MFG CO LTD6 citations72
US11069533B2Jul 20, 2021

CMP system and method of use

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11772228B2Oct 3, 2023

Chemical mechanical polishing apparatus including a multi-zone platen

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US11679469B2Jun 20, 2023

Chemical mechanical planarization tool

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US12311495B2May 27, 2025

Temperature control in chemical mechanical polish

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11904430B2Feb 20, 2024

Temperature control in chemical mechanical polish

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11631618B2Apr 18, 2023

Thickness sensor for conductive features

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11621342B2Apr 4, 2023

Semiconductor device, method, and tool of manufacture

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63

CHEN CHIH-HUNG

7 patents

IND TECH RES INST

4 patents

FIRST BRANDS CORP

3 patents

DARFON ELECTRONICS CORP

3 patents

LIVINGSTYLE ENTERPRISES LTD

3 patents

GLAD PRODUCTS CO

2 patents

PRIMAX ELECTRONICS LTD

2 patents

APPLIED MATERIALS INC

2 patents

CHEN CHIH HUNG

1 patent

OPTOMEDIA TECHNOLOGY INC

1 patent

LO CHI WEI

1 patent

STANLEY BLACK & DECKER INC

1 patent

QISDA (SUZHOU) CO LTD

1 patent

UNITED MICROELECTRONICS CORP

1 patent

WISTRON CORP

1 patent

CHEN MING-YUN

1 patent

TYMPHANY ACOUSTIC TECH HUIZHOU CO LTD

1 patent

NANYA TECHNOLOGY CORP

1 patent

Showing the top 50 of 125 patents by PatentIndex Score.